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Folded Beam MEMS Structure

Posted May 6, 2016, 5:25 a.m. EDT MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Modeling Tools & Definitions, Parameters, Variables, & Functions, Structural Mechanics Version 5.2 0 Replies

Sivaharan Rajkumar
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Hi All,

I have set up a folded beam MEMS structure. The simulations runs fine (For solid mechanics physics), but I am having an error with regards to varying the load applied to a the moving comb electrode. This is only using the the solid mechanics physics at the moment.

Ultimately what I am trying to find is to get table of Spring Constants (k) for a given Force (F) for this stricture.

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0 Replies Last Post May 6, 2016, 5:25 a.m. EDT
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Hello Sivaharan Rajkumar

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