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Comb Drive Simulation Inverted Mesh Element Error
Posted Nov 3, 2016, 12:14 p.m. EDT MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Mesh 0 Replies
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I am new to COMSOL and am working with electromechanics module in COMSOL 5.0 through my university license access for electrostatic actuation simulation using comb drive structure. The structure of my design is very large at approximately 580-micron wide and 2056-micron long supported by multiple silicon spring beams. Initially parametric sweep over a voltage range showed “inverted mesh element near coordinates……..” error so I changed my spring structure to make it more stiff and include refined meshing at the corners of the spring structure and at the air box surrounding the comb drive with minimum element size as low as 0.25-micron and resolution set as 3. However, the different refined meshing that I have tried result in a similar inverted mesh element error at around 90V.
Analytically from my calculations the pull-in effect should take place around 5-micron displacement at least and thus producing errors which could not be resolved.
How could I negate these errors and obtain solutions for my model over a larger voltage range? I have attached the model file in this email for your reference.
Best,
Suraj
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Hello Suraj Sharma
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