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Parametric sweep where the range of one parameter depends on the other

Posted May 31, 2017, 5:47 a.m. EDT MEMS & Nanotechnology, MEMS & Piezoelectric Devices Version 5.2 0 Replies

Thomas Middelburg
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I am working on a model where a certain parameter, "tsupp", is only defined for a range of another parameter, "angle". Namely tsupp cannot be smaller than t0*cos(angle), where t0 is a constant. I want to do a double parametric sweep that sweeps through both "tsupp" and "angle", so I have tried to define it as follows:

angle - range(30[deg],10[deg],60[deg])
tsupp - range(t0*cos(angle),(t1-(t0*cos(angle)))/5,t1)

t0 in this case is 100nm and t1 is 130nm.

This, however, doesn't work. I think the range of tsupp is defined once for one angle, and when that angle changes, the range of tsupp is not updated, leading to a broken geometry. Is there a method that will allow me to sweep through both of these parameters?

Thank you in advance!
0 Replies Last Post May 31, 2017, 5:47 a.m. EDT
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