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How to define the boundaries in a sectioned MEMS-model

Posted Jul 7, 2011, 10:52 a.m. EDT MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Structural Mechanics Version 4.2 0 Replies

Jürgen Gluch
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I have difficulties to set the right constraints to some boundaries of my MEMS model. As the the whole device is too big (some millimeter) to simulate, I modeled only a small section (roughly 150µm). The model consists of a chip and a coated MEMS torsion beam that operates at elevated temperature (>100°C).
If I apply "fixed constrained" to the boundaries where the chip material would continue in a not sectioned model, than I get additional thermal stress in the edges. Same applies to the "rigid connector" used at the end of the torsion beam.

How to set the boundary conditions to eliminate these artifacts? Is there something like infinite material or continuity for exterior boundaries?

And which properties should I use for heat transfer through the boundaries where the chip material would continue in a not sectioned model?

Thanks you.
Jürgen
0 Replies Last Post Jul 7, 2011, 10:52 a.m. EDT
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Hello Jürgen Gluch

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