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Plasma simulation error - cannot calculate denomMn

Posted Aug 17, 2021, 2:15 p.m. EDT Low-Frequency Electromagnetics, Plasma Physics, Fluid & Heat Version 5.6 0 Replies

Anamika Chowdhury
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I am trying to simulate ICP plasma in a chamber with continuous gas inflow (and outflow). The chmaber itself is maintained at low pressure (0.025 Torr), but the inlet flow rate is specified using mass flow boundary condition at 1 atm pressure.

I am using the plasma, magnetic fields module and laminar flow module (to model the fluid flow).

I am encountering the following error:

Division by zero. Function: / Failed to evaluate variable. Variable: comp1.plas.Mn, Defined as: 1/comp1.plas.denomMn

Any suggestions on how to resolve this?

0 Replies Last Post Aug 17, 2021, 2:15 p.m. EDT
COMSOL Moderator

Hello Anamika Chowdhury

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