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comb drive accelerometer
Posted Jun 23, 2012, 6:16 a.m. EDT 0 Replies
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i am implementing comb drive capacitive accelerometer in comsol 4.0a. and using film damping shell to account for squeeze film damping ...boundary conditions which i hav given are..... entire structure(all boundaries) i am considering
considering for film damping shell physics...but considering only movable fingersfor boundary load in solid mechanics which is dependent on fluid(fluidload/lemm1) .....
my problem is, suppose if i give 1g acceleration i get some say 0.4nm displacement in x direction
for 2g acclrn i get say 0.7nm displacement but if i again apply 1g acceleration the value will be different
i.e i am not getting consistent values for same amount of acceleration
this problem is same with calculation of capacitance
please help me in this regard
thank you
i am attaching my module image
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Hello Sangamesh Vandal
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