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Why only Ar has no "pA" in its rho property for calculation?

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Hi Found the basic property "rho" (density) of most gases involving the "pA" (pressure) and the "T" (temperature) but Argon, different from all other gases, only invloved the "T" (temperature) in its "rho" (density) basic property. Is it a bug?! or are there any reasons for this unique property because I'm afraid that this would impact the CFD simulation results since Argon is commonly used in semiconductor process. Look forword your reply. Thanks!!


0 Replies Last Post May 8, 2022, 9:49 a.m. EDT
COMSOL Moderator

Hello Yu-Young Wang

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