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does not show plasma, although the plot converges

Posted Nov 3, 2022, 8:02 a.m. EDT Plasma Physics, RF & Microwave Engineering, Results & Visualization Version 6.0 1 Reply

Akash Tripathi
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I'm trying to simulate H2 plasma using the microwave plasma module in the CVD at 1.5 kW of power and 120 torr of pressure. After compilation, the plot converges smoothly (see the overlayed images below) but doesn't show the plasma above the substrate holder. Can anyone suggest where the problem is in the model?

1 Reply Last Post Dec 1, 2022, 6:57 a.m. EST
Abhinav MPCVD reactor simulation
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Posted: 2 years ago Dec 1, 2022, 6:57 a.m. EST

Don't rely completely on the COMSOL results. Sometimes its results are not appropriate. I'm also facing the same problem. Change some parameters such as initial electron density, Gas pressure etc. All the best

Don't rely completely on the COMSOL results. Sometimes its results are not appropriate. I'm also facing the same problem. Change some parameters such as initial electron density, Gas pressure etc. All the best

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