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Please help me in Microwave Plasma simulation
Posted Nov 11, 2022, 5:55 a.m. EST Plasma Physics, RF & Microwave Engineering 1 Reply
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In the model, first of all, I did the simulation for electric field distribution using EM waves, frequency domain (emw) in order to optimise the geometry. Once the geometry is optimised, I get an electric field above the substrate holder. After that, when I simulated the same geometry for the microwave plasma using the microwave plasma module, the position of the plasma was below the substrate holder, near the quartz window. Kindly clear my doubt about why I'm not getting plasma at the position where the field is strong. (Please see the attached jpg file below)
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Hello Abhinav
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Hello Abhinav,
I am also facing same issue. EM simulation is going well and shows E-field on the substrate, However, Microwave plasma module does not shown the density profile on same location. It was near to quartz window only.
can we discuss this personally to get it undersatnd. You can drop me your contact or email ID. My email address is--- akash.rs.ece15@itbhu.ac.in