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MEMS

Posted Dec 14, 2022, 5:50 p.m. EST MEMS & Piezoelectric Devices 0 Replies

Auma D
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hello ,i am beginner ,I'm designing an accelerometer and calculating the sensitivity of the accelerometer's electrode capacitance to applied acceleration. I did a stationary study and applied acceleration (0,0.02,1) g, I don't know how to get the global evaluation matrix for the capacitance, I only have results that depend on the solid mechanics . the seconde question, if i want to apply SPL inputs with fixed frequency to accelerometer , which type of physics should i use

0 Replies Last Post Dec 14, 2022, 5:50 p.m. EST
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Hello Auma D

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