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slide film damping

Posted Jul 20, 2013, 4:18 a.m. EDT MEMS & Nanotechnology, MEMS & Piezoelectric Devices Version 4.3 0 Replies

John Esmith
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Hi,
I am trying to model slide film damping into my comp capacitive accelerometer. COMSOL already has a model for squeezed film damping. What are the changes I need to make in order to model slide film damping?

Thank you
0 Replies Last Post Jul 20, 2013, 4:18 a.m. EDT
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