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Question about "Pull-in of an RF MEMS Switch" in COMSOL model library (v4.4)
Posted Jul 14, 2014, 4:15 a.m. EDT MEMS & Nanotechnology, MEMS & Piezoelectric Devices Version 4.4, Version 5.2 1 Reply
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I am trying to model a MEMS device that is something like a capacitor whose bias voltage is above the pull-in voltage. So I want to investigate the behavior of the "collapsed" of the top plate of capacitor.
Since it is impossible to collapse the mesh to zero thickness in COMSOL, the stationary study will not convergence.
In COMSOL v4.4, I found an useful reference of " Pull-in of an RF MEMS Switch" in the model library. It uses a mean of a spatially varying function for the dielectric constant within the gap to overcome the mesh problems. However, the stationary study just used for calculating the initial capacitance, and the collapsed phenomenon is simulated by a Time Dependent in the study.
I want to investigate the stationary status after the pull-in. When I try to build the stationary model with this mean but failed because of the non convergence.
I don't know whether this tip in the model library is suitable for stationary study.
The reference pdf file is attached. Any suggestion is appreciated!
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Hello Yuanyu Yu
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Thanks!