The Application Gallery features COMSOL Multiphysics® tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and chemical disciplines. You can use these examples as a starting point for your own simulation work by downloading the tutorial model or demo app file and its accompanying instructions.
Search for tutorials and apps relevant to your area of expertise via the Quick Search feature. Note that many of the examples featured here can also be accessed via the Application Libraries that are built into the COMSOL Multiphysics® software and available from the File menu.
This model shows how to compute the thickness of a thermally evaporated gold film. The thickness of the deposited film is computed both on the walls of the chamber and on the sample. Read More
Ion implantation is used extensively in the semiconductor industry to implant dopants into wafers. Within an ion implanter, ions generated within an ion source are accelerated by an electric field to achieve the desired implant energy. Ions of the correct charge state are selected by ... Read More
Chemical vapor deposition (CVD) is a process often used in the semiconductor industry to grow layers of high-purity solid material on top of a wafer substrate. CVD is achieved using many different techniques and across a range of pressures from atmospheric to ultrahigh vacuum (UHV/CVD). ... Read More
This model computes the transmission probability through an s-bend geometry using both the angular coefficient method available in the Free Molecular Flow interface and a Monte Carlo method using the Mathematical Particle Tracing interface. The computed transmission probability by the ... Read More
Differentially pumped vacuum systems use a small orifice or tube to connect two parts of a vacuum system that are at very different pressures. Such systems are necessary when processes run at higher pressures and are monitored by detectors that require UHV for operation. In this model, ... Read More
This model computes the transmission probability through an RF coupler using both the angular coefficient method available in the Free Molecular Flow interface and a Monte Carlo method using the Mathematical Particle Tracing interface. The computed transmission probability determined by ... Read More
Gas cells have several applications in the design of scientific instruments. A gas cell is used to define a high-pressure region within the instrument's main vacuum system. For example, in this application, note we are designing a high-pressure region 100 mm long, with an operating ... Read More
This model shows how to simulate the time-dependent adsorption and desorption of water in a vacuum system at low pressures. The water is introduced into the system when a gate valve to a load lock is opened and the subsequent migration and pumping of the water is modeled. Read More
A charge exchange cell consists of a region of gas at an elevated pressure within a vacuum chamber. When an ion beam interacts with the higher-density gas, the ions undergo charge exchange reactions with the gas which then create energetic neutral particles. It is likely that only a ... Read More
This benchmark model computes the pressure in a system of outgassing pipes with a high aspect ratio. The results are compared with a 1D simulation and a Monte-Carlo simulation of the same system from the literature. Read More