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Design and Simulation of a Piezoelectric Actuated Valveless Micropump
Published in 2015
Microfluidics is a multidisciplinary field, basically it designs systems to handle small volumes of fluids. Most applications require a pumping action in order to move the fluid trough the system. For most of them a micro scale active pump is highly desirable. A piezoelectric micropump is modeled, the actuator is a PZT-5H piezo-disk and the diaphragm is a borosilicate glass plate. COMSOL Multiphysics® software was used to choose the right membrane to piezo thickness relation and to simulate the pumping system under a sinusoidal voltage applied to the piezo actuator.
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