Electromagnetic Compatibility (EMC) Simulation of RF Matching Network for Plasma Application
The RF matching network is a critical component positioned between the RF generator and the plasma chamber, designed to transform the plasma impedance to a value suitable for the RF generator. Because the matching network design must be highly customized based on the specific conditions within the plasma chamber, accurate simulation during the design phase is crucial. The simulation team at Hüttinger China employs a hybrid simulation approach that integrates electromagnetic field and circuit modeling to accurately represent the electromagnetic compatibility (EMC) conditions within the matching network. This simulation methodology has been validated through experimental measurements, demonstrating its reliability. By optimizing multiple parameters, further improvements in the design of the RF matching network can be achieved.
