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Micromachined Silicon Integrating Cavities for Far-Infrared Bolometer Arrays

M. Audley[1], G. de Lange[1], G. Keizer[1], C. Bracken[2]
[1]SRON Netherlands Institute for Space Research, Groningen, The Netherlands
[2]National University of Ireland, Maynooth, Co. Kildare, Ireland
Published in 2014

We are investigating gold-plated micromachined silicon integrating cavities for arrays of far infrared Transition Edge Sensor bolometers. We present the results of our simulations and show how we used COMSOL Multiphysics® software to optimize the geometry of the integrating cavity. We show that we can achieve a high optical efficiency over a wide frequency range.

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