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Engineers, researchers, and scientists across industries use multiphysics simulation to research and develop innovative product designs and processes. Find inspiration in technical papers and presentations they have presented at the COMSOL Conference. Browse the selection below or use the Quick Search tool to find a specific presentation or filter by application area.

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MEMS and Nanotechnology

Ion Concentration and Electromechanical Actuation Simulations of Ionic Polymer-Metal Composites

K. J. Kim [1], T. Stalbaum [1], Q. Shen [1],
[1] Department of Mechanical Engineering, University of Nevada, Las Vegas, NV, USA

Ionic polymer-metal composite (IPMC) materials are promising candidates for soft robotics and artificial muscle applications. The primary actuation mechanism in such devices is ion migration in a polymer membrane, localized swelling, and a corresponding overall material deformation, ... Read More

Finite Element Analysis of Contact Studies of Radio Frequency MEMs Switch Membranes

J. Liu [1], V. B. Chalivendra [1], C. Goldsmith [1], W. Huang [1]
[1] University of Massachusetts - Dartmouth, Dartmouth, MA, USA

Radio frequency (RF) micro-electro mechanical system (MEMS) switch works in on/off modes controlled by electrostatic forces. In off mode, rough surfaces of electrodes come into a contact. Membrane contact surfaces have complex surface roughness patterns and the mechanical contact problem ... Read More

Multiple-Mode Polymeric-Silicon Dual-Channel Gas Sensors

K. Liang [1], A. Dodabalapur [1], D. Sharma [1],
[1] Microelectronics Research Center, University of Texas, Austin, TX, USA

An organic-inorganic dual-channel sensor makes a strong chemical gas sensor because this device design combines the high chemical sensitivities and selectivity of organic semiconductors [1-4] with the superior electrical performance and convenient integration of silicon semiconductors. ... Read More

Optimization of Microstructures Used in CMOS-MEMS Devices Based on a Topological Design Process

J. Mares-Carreño [1], G. S. Abarca-Jiménez [2], M. A. Reyes-Barranca [2],
[1] Escuela Superior de Ingeniería Mecánica y Eléctrica, Instituto Politécnico Nacional, Ciudad de Mexico, D.F., Mexico
[2] Centro de Investigación y de Estudios Avanzados del Instituto Politécnico Nacional, Ciudad de México, D.F., Mexico

The paper exhibits the process followed to obtain the geometry of a support for a MEMS inertial sensor by means of a topology optimization process. The SIMP method is used for the optimization process in which the objective is to obtain a support structure with a minimum rigidity ... Read More

Finite Element Modeling of MEMS Chevron Thermal Actuators for Strain Engineering of Graphene

M. Vutukuru [1], J. Christopher [2], B. Goldberg [1,2], D. Bishop [1,2,3], A. Swan [1,2,3]
[1] Department of Electrical and Computer Engineering, Boston University, Boston, MA, USA
[2] Department of Physics, Boston University, Boston, MA, USA
[3] Division of Material Science Engineering, Boston University, Boston, MA, USA

Graphene, a single layer of carbon atoms, has demonstrated extremely high electric and thermal conductivities, tensile strength, and is therefore an exciting novel building block in the world of 2D flexible electronics. We propose the integration of graphene with MEMS devices to ... Read More

Theoretical and Experimental Validation of Micro Hot Embossing on Polymeric Substrates

F. Lai [1], N. K. Shivaprakash [1], J. Zhang [1], A. Panwar [1], J. Mead [1], C. Barry [1], Q. Truong [2],
[1] University of Massachusetts Lowell, Lowell, MA, USA
[2] US Army Natick Soldier Research, Development and Engineering Center, Natick, MA, USA

Micro hot embossing on a large area polymeric substrates using roll-to-roll (R2R) mode has been considered as one of the most promising technologies that can offer continuous fabrication of large area polymeric substrates. Besides continuous operation, roll-to-roll (R2R) process offers ... Read More

Anisotropic Damping in MEMS Oscillator

S. Silvestrini [1],
[1] Delft University of Technology, Delft, Netherlands

The analyzed MEMS oscillator is composed by a spring (beam) supported mass that needs to vibrate with a high Q-factor in the horizontal plane. Nevertheless, the transverse motion needs to be highly damped (low Q-factor). The purpose of the work was to explore different system ... Read More

Push or Pull, How Does Silk Flow?

J. Sparkes [1],
[1] University of Sheffield, Sheffield, UK

Silk is one of the longest used and most recognizable textiles that we, as a society, use regularly. We see it as a luxury good, worn as an indicator of success and value. However, despite mankind having domesticated and farmed silkworms for millennia, we still know relatively little ... Read More

Finite Element Model of Surface Acoustic Wave Scattering with High-Aspect-Ratio Irregularities

S. Iuliia [1], Y. Sergey [1], K. Sergey [1], P. Alexey [1],
[1] Saratov State University, Saratov, Russia

The design of surface acoustic wave (SAW) devices needs the accurate study of the scattering fields, arising from the interaction of SAW with periodic irregularities placed on a surface of crystal to form interdigital transducers or reflective structures (RS). To solve this problem, the ... Read More

Modeling and Simulation of Piezoresistive Pressure Sensor for 2bar Application

M. Ramezani [1], M. El Barkouky [1],
[1] Melexis, Tessenderlo, Belgium

In this paper, we focused on modeling of the piezoresistive pressure sensors. The Structural Mechanics Module of COMSOL Multiphysics® software is used to model the sensor and make a comparative study of the MEMS pressure sensor with different shape and size of membrane. The impact of ... Read More

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