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MEMS pressure sensor

Posted Oct 4, 2009, 7:36 a.m. EDT 0 Replies

Amir Tabatabaei
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Hi

I want to know why the 3-d MEMS capacitance pressure sensor in model library is like this.
I mean why there is a hole in the structure. In other hand it couses little changes in cpapacitance due to ambient pressure canges.

May be if we use simple capacitor we get better result with more changes in output.

The second question is that how that thin layer can displace due to pressure changes.

Please explain more about this structure.
0 Replies Last Post Oct 4, 2009, 7:36 a.m. EDT
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Hello Amir Tabatabaei

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