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Frequency Analysis for structure with Film Damping

Posted Mar 29, 2011, 3:06 a.m. EDT MEMS & Nanotechnology, MEMS & Piezoelectric Devices Version 3.5a, Version 4.2, Version 4.2a 4 Replies

Siddhartha Patra
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Hi All,
I want to do frequency response analysis for a structure with film damping. Is there any existing model in comsol for that or has anybody done somethin on this? Please let me know if you have any information.
Thanks,
Siddhartha
4 Replies Last Post Nov 2, 2011, 11:32 a.m. EDT
Ivar KJELBERG COMSOL Multiphysics(r) fan, retired, former "Senior Expert" at CSEM SA (CH)
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Posted: 1 decade ago Mar 29, 2011, 3:20 p.m. EDT
Hi

have you checked the model builder in the mems section, there is a film damping example, cannot remember if it was frequency sweep (believe so) or only eigenfrequency analysis

--
Good luck
Ivar
Hi have you checked the model builder in the mems section, there is a film damping example, cannot remember if it was frequency sweep (believe so) or only eigenfrequency analysis -- Good luck Ivar
Siddhartha Patra
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Posted: 1 decade ago Apr 1, 2011, 1:32 a.m. EDT
Hi Ivar,
I have found one example on squeeze film, but it is on a transient problem.
Siddhartha
Hi Ivar, I have found one example on squeeze film, but it is on a transient problem. Siddhartha
Siddhartha Patra
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Posted: 1 decade ago Apr 3, 2011, 6:02 a.m. EDT
Hi,
I want to find out frequency response of a squeeze film with structure. Can anybody help me with existing module or instructions?
Thanks,
Siddhartha
Hi, I want to find out frequency response of a squeeze film with structure. Can anybody help me with existing module or instructions? Thanks, Siddhartha
dnh37
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Posted: 1 decade ago Nov 2, 2011, 11:32 a.m. EDT
Hi Siddhartha,

Did you find a solution?

I also want to do squeeze-film damping frequency response. Mostly I just want to model the quality factor.

The other problem is, I have an arbitrary geometry. The model in the Comsol Model Library uses the math to assume the air is squeezed out only at the edges -- if you add periodic holes then you have to use different math to assume that the air is squeezed out the holes. (So you can see what I mean, go here: www.comsol.com/multiphysics/slidingfilms/, download the pdf for the model, and look on Page 2 where it references Ref 3).
However Ref 3 only includes periodic holes. I have a funny arbitrary geometry...

Any ideas?

Thanks
Hi Siddhartha, Did you find a solution? I also want to do squeeze-film damping frequency response. Mostly I just want to model the quality factor. The other problem is, I have an arbitrary geometry. The model in the Comsol Model Library uses the math to assume the air is squeezed out only at the edges -- if you add periodic holes then you have to use different math to assume that the air is squeezed out the holes. (So you can see what I mean, go here: http://www.comsol.com/multiphysics/slidingfilms/, download the pdf for the model, and look on Page 2 where it references Ref 3). However Ref 3 only includes periodic holes. I have a funny arbitrary geometry... Any ideas? Thanks

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