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Doping Polysilicon

Posted Dec 28, 2017, 4:23 p.m. EST MEMS & Nanotechnology, MEMS & Piezoelectric Devices Version 5.2 0 Replies

Hoda Farhat
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I am trying to dope polysilicon material to have n++ polysilicon. What is the best way to do so? What shall I change in the material property?

0 Replies Last Post Dec 28, 2017, 4:23 p.m. EST
COMSOL Moderator

Hello Hoda Farhat

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