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How to obtain the plot of frequency shift w.r.t. pressure in a micro resonator (cc beam) based MEMS pressure sensor in COMSOL?
Posted Feb 2, 2021, 2:24 a.m. EST 0 Replies
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Hello, can somebody help me for the following- I need to know how to plot the impact of pressure (e.g. 0 - 100 kPa) (which is applied on the back side of diaphragm) on the frequency shift caused in the cc beam supported on the diaphragm with supports. The clamped clamped beam is electrostatically actuated with an electrode embedded in the diaphragm.
Thanking in anticipation. Regards Anshu
Hello Anshu Sharma
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