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Analysis of silicon circular diaphragm deflection
Posted Jun 2, 2012, 1:21 p.m. EDT MEMS & Nanotechnology, MEMS & Piezoelectric Devices 1 Reply
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Hi all,
Is there any tutorial or guidance for me to make an analysis of diaphragm deflection ?
I'm working on v3.5..Already tried to solve it.But still don't have a solution.Confusing to follow which module.I'm a beginner for this software.
Your kindly feedback is highly appreciated.
Regards.
Is there any tutorial or guidance for me to make an analysis of diaphragm deflection ?
I'm working on v3.5..Already tried to solve it.But still don't have a solution.Confusing to follow which module.I'm a beginner for this software.
Your kindly feedback is highly appreciated.
Regards.
1 Reply Last Post Jun 3, 2012, 9:06 a.m. EDT
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Posted:
1 decade ago
Anyone know the solution??
I've tried using structural mechanics module as mention in this thread <www.comsol.com/community/forums/mems/thread/15926/>
but still didn't get a solution.
I need to analyze the membrane deflection when pressure applied on its surface.
Kindly assist..
Regards.
Intan
I've tried using structural mechanics module as mention in this thread <www.comsol.com/community/forums/mems/thread/15926/>
but still didn't get a solution.
I need to analyze the membrane deflection when pressure applied on its surface.
Kindly assist..
Regards.
Intan