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Evaluating resonant frequency.

Posted Jun 22, 2012, 12:51 p.m. EDT MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Structural Mechanics Version 4.2a 2 Replies

Vijay Ramakrishnan
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Dear sir,
I have modeled a mems piezoresistive pressure sensor. I have included only the solid mechanics module.
I want to know how to find the resonant frequency of the structure ? Plz tell me in detail if i have to include any other physics module and which options i should use.
Thanking you
2 Replies Last Post Jun 22, 2012, 3:51 p.m. EDT
Ivar KJELBERG COMSOL Multiphysics(r) fan, retired, former "Senior Expert" at CSEM SA (CH)
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Posted: 1 decade ago Jun 22, 2012, 2:24 p.m. EDT
Hi

the natural resonance frequencies are obtained from a structure if the geometry is fixed correctly and you run an eigenfrequency analysis on it, only SOLID is required. However, you might want to add some damping depending on how your structure is assembled or if it interacts with its surrounding.
The easiest is to add a damping sub node to the solid - linear elastic material node. But perhaps you need to consider fluid damping in which case you need to add additional fluid models and more (check the library model of a damped MEMS resonator).
In any case start simple (no damping then add complexity by steps

--
Good luck
Ivar
Hi the natural resonance frequencies are obtained from a structure if the geometry is fixed correctly and you run an eigenfrequency analysis on it, only SOLID is required. However, you might want to add some damping depending on how your structure is assembled or if it interacts with its surrounding. The easiest is to add a damping sub node to the solid - linear elastic material node. But perhaps you need to consider fluid damping in which case you need to add additional fluid models and more (check the library model of a damped MEMS resonator). In any case start simple (no damping then add complexity by steps -- Good luck Ivar
Bjorn Sjodin COMSOL Employee

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Posted: 1 decade ago Jun 22, 2012, 3:51 p.m. EDT
The new version of the MEMS Module has 3 new dedicated user interfaces for piezoresistivity. Please see:
www.comsol.com/products/4.3/#mems
for more information.
The new version of the MEMS Module has 3 new dedicated user interfaces for piezoresistivity. Please see: http://www.comsol.com/products/4.3/#mems for more information.

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