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Material setting for silicon-based piezoelectric MEMS resonators

Posted Oct 26, 2022, 3:34 a.m. EDT 0 Replies

泽鑫 孙
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I am doing the simulation of the silicon MEMS piezoelectric resonator, but I have encountered difficulties in the anisotropy setting of silicon, and the results of two-dimensional simulation and three-dimensional simulation are different, the results of three-dimensional simulation are not ideal, is there also someone doing the simulation of MEMS piezoelectric resonator? Hope I can learn from you.

0 Replies Last Post Oct 26, 2022, 3:34 a.m. EDT
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Hello 泽鑫 孙

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