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How to get stress tensor in silicon nitride waveguide?
Posted Nov 17, 2022, 11:35 a.m. EST MEMS & Piezoelectric Devices, Structural Mechanics, Physics Interfaces Version 6.0 0 Replies
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Hello, I am simulating a PZT actuator on a Silicon Nitride waveguide in 2D to observe stress distribution in the whole structure. The design is based on a publication. I am getting stress only in the PZT layer by applying voltage on the Pt electrodes (See the attachment1). However, I need to get the stress in the waveguide structure (Si3N4 waveguide and surrounding SiO2 cladding) like the attachment 2. I am using Solid Mechanics and Electrostatics physics to observe the stress distribution. Do I need to couple other physics to obtain the stress distribution in the waveguide structure? I am using fixed constrain to compact the stress inside the structure but I am not sure whether it is a correct boundary condition or not. It will be a great help if I get any valuable suggestion from here.
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Hello Rifat Nazneen
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