Mesh Sizing and Optimization for Accurate Displacement Measurement

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Hello everyone, I hope you're doing well. I have a few questions regarding meshing and its impact on accurate displacement measurement. I am working on a structure designed to displace by 20 nanometers, and I facing some challenges in determining the optimal meshing parameters. I hope you're doing well. I have a few questions regarding meshing and its impact on accurate displacement measurement. I am working on a structure designed to displace by 20 nanometers, and I am facing some challenges in determining the optimal meshing parameters. 1. What would be the recommended minimum and maximum element size for the mesh to accurately capture this 20-nanometer displacement? 2. Considering that my structure is quite complex (including springs and several fingers for sensing), what meshing strategy or type would you recommend to ensure the most accurate results with minimal error? 3. Finally, does reducing the mesh size always improve accuracy? Or is there an optimal range for the mesh size beyond which further refinement does not provide significant benefits? As a side note: I have also attached the dimensions and size of the sensor finger and its gap (d1 and d2). In the attached figure, there is a 20-nanometer displacement along the x-axis in the d1 direction. I would greatly appreciate any advice, tips, or insights on this matter.



0 Replies Last Post Dec 18, 2024, 6:03 a.m. EST
COMSOL Moderator

Hello Amir Sayedi

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