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Piezoelectric contour mode resonator

Posted Feb 28, 2013, 1:31 p.m. EST 0 Replies

Tushar Ars
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Hello,

I am new to the COMSOL. I am trying to simulate a contour mode MEMS resonator. I want to see the length extensional mode of vibration at the fundamental frequency. However, I am getting different results. I think, I am not setting the boundary conditions correctly.

Can anyone help me regarding this.
I have attached a photo of the model. I have two Al electrodes and ZnO film between the electrodes. If I set the boundary conditions correctly, I should see the length extension in y direction at the fundamental frequency.

Thanks

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0 Replies Last Post Feb 28, 2013, 1:31 p.m. EST
COMSOL Moderator

Hello Tushar Ars

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