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Meshing a MEMS chip
Posted Jun 7, 2013, 2:56 a.m. EDT MEMS & Nanotechnology, Heat Transfer & Phase Change, MEMS & Piezoelectric Devices, Mesh Version 4.3 0 Replies
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I'm trying to mesh a MEMS chip, which is a Pt Temperature sensor.
There is a Si wafer, thermal oxide, patterning Pt and deposit PECVD oxide.
When there is no PECVD oxide, I could mesh this chip using swept mesh.
However, I cannot mesh when there is a 'cover' of PECVD oxide.
What should I do?
Any opinions will be welcomed^^
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Hello Chang-Ho Han
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