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Electrostatic Spring Softening in MEMS structures [ resonator Beams]

Posted Jan 27, 2014, 2:44 a.m. EST MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Modeling Tools & Definitions, Parameters, Variables, & Functions, Studies & Solvers, Structural Mechanics Version 4.3, Version 4.3a, Version 4.3b, Version 4.4 3 Replies

Saurabh Mittal
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While I run "electromechanics" module for a MEMS resonator beam, I select "Prestressed analysis Eigenfrequency". Now my question is whether COMSOL considers the Electrostatic Spring Softening which solving?

Electrostatic Spring Softening is the change in the natural frequency of a MEMS structure due to presence of the Electric field in surrounding the MEMS structure. There is always a reduction in stiffness of the Mems structure which reduces the natural frequency, thus called spring softening.

Is there any option to toggle "Electrostatic Spring Softening" effects so that we can compare the results with and without spring softening?
3 Replies Last Post Feb 3, 2014, 10:07 a.m. EST
Paolo Minotti
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Posted: 1 decade ago Feb 3, 2014, 9:44 a.m. EST
If you apply a voltage across the rotor/stator, COMSOL will consider the spring softening.
If you don't apply any voltage, COMSOL won't consider it.
If you apply a voltage across the rotor/stator, COMSOL will consider the spring softening. If you don't apply any voltage, COMSOL won't consider it.
Saurabh Mittal
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Posted: 1 decade ago Feb 3, 2014, 9:55 a.m. EST
Dear Paolo Minotti

After applying voltage, the deflection takes place and then there is two causes of changes in stiffness:
(1) Due to internal stresses due to deformation
(2) Due to the electrostatic field

Can we switch on and off (2) option?
Can we compare bot h the results?


Dear Paolo Minotti After applying voltage, the deflection takes place and then there is two causes of changes in stiffness: (1) Due to internal stresses due to deformation (2) Due to the electrostatic field Can we switch on and off (2) option? Can we compare bot h the results?
Paolo Minotti
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Posted: 1 decade ago Feb 3, 2014, 10:07 a.m. EST
Ok, I don't know if there's any ON/OFF button.

But... maybe you can study your system with Electromechanics (button ON) and then study the same system with Solid Mechanics (button OFF) and then compare your results.
Ok, I don't know if there's any ON/OFF button. But... maybe you can study your system with Electromechanics (button ON) and then study the same system with Solid Mechanics (button OFF) and then compare your results.

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