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TED damping in resonator

Posted Apr 16, 2014, 9:08 a.m. EDT MEMS & Nanotechnology, Heat Transfer & Phase Change, MEMS & Piezoelectric Devices, Structural Mechanics Version 4.2a 1 Reply

Ha Ha
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Dear all,

Coul d anyone please tell me how to model thermoelastic damping in mems resonator using anisotropic material. In this paper "Thermoelastic Damping in a MEMS Resonator", the author just use solid model: isotropic. But when I change to anisotropic, the simulation get error.

Thanks advance!
1 Reply Last Post Apr 17, 2014, 9:18 a.m. EDT
Alex Lindjuk
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Posted: 1 decade ago Apr 17, 2014, 9:18 a.m. EDT
Hi, I think you forgot to enter some material properties, like: coefficient of thermal expansion, thermal conductivity and heat capacity at constant pressure....

I have no problems with my anisotropic TED simulation....
Hi, I think you forgot to enter some material properties, like: coefficient of thermal expansion, thermal conductivity and heat capacity at constant pressure.... I have no problems with my anisotropic TED simulation....

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