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difference between Capacitively coupled plasma and AC-DBD

Posted Feb 11, 2015, 10:38 a.m. EST Plasma Physics, Fluid & Heat, Modeling Tools & Definitions, Parameters, Variables, & Functions Version 4.4 2 Replies

Syed Zaid Ali
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Hello Everyone !

Can anyone help me in understanding the difference between capacitively coupled plasma (CCP) and an AC-DBD?

I appreciate your effort and help.

Thanks a lot!!

Best regards
Zaid
2 Replies Last Post May 23, 2016, 9:39 a.m. EDT
Daniel Smith COMSOL Employee

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Posted: 10 years ago Feb 11, 2015, 12:30 p.m. EST
Hi, a DBD usually has 2 dielectric surfaces adjacent to the plasma and operates at frequencies in the kHz range. A capacitively coupled plasma usually has one dielectric surface adjacent to the plasma, the rest are grounded. They typically operate in the MHz range. From a modeling perspective, the equations solved are identical, only the driving frequency and selection for the boundary conditions are different.
Hi, a DBD usually has 2 dielectric surfaces adjacent to the plasma and operates at frequencies in the kHz range. A capacitively coupled plasma usually has one dielectric surface adjacent to the plasma, the rest are grounded. They typically operate in the MHz range. From a modeling perspective, the equations solved are identical, only the driving frequency and selection for the boundary conditions are different.
Arnold Huang
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Posted: 9 years ago May 23, 2016, 9:39 a.m. EDT
Hi, Smith
I would like to ask a general question regarding a capacitor at high frequency (60 MHz up).
As we know, a changing electric field acts to produce a oscillating magnetic filed.
However, when there is a magnetic field that is varying, there will also be induced electric fields.
This means that the electric field cannot be the same at all distances from the capacitor center.

I need to study high frequency transient electric and magnetic fields together in one model, with coupled effects.
Could you give me a hint, how to simulate "standing wave profile" phenomenon in comsol?
Hi, Smith I would like to ask a general question regarding a capacitor at high frequency (60 MHz up). As we know, a changing electric field acts to produce a oscillating magnetic filed. However, when there is a magnetic field that is varying, there will also be induced electric fields. This means that the electric field cannot be the same at all distances from the capacitor center. I need to study high frequency transient electric and magnetic fields together in one model, with coupled effects. Could you give me a hint, how to simulate "standing wave profile" phenomenon in comsol?

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