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Thermal expansion effects of the gas inside the MEMS pressure sensor

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Hi,
I want to simulate the thermal expansion effects of the gas inside the MEMS pressure sensor.
What should I do in the case of the MEMS capacitive pressure sensor tutorial example.

Thanks a lot

0 Replies Last Post May 27, 2015, 12:28 p.m. EDT
COMSOL Moderator

Hello Chin Fu Kuo

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