* ED23146
* Knowles, 2014
.subckt ED23146 p1 n1 p2 n2
Cback N0010 N0005 3.07e-13
Ceff N0035 N0030 8.18e-14
Cfront N0010 n2 4.55e-14
Cgap N0025 n2 1.02e-13
Cmech2 N0035 n2 2.89e-14
G1_1 N0020 n1 N0015 n2 -1.8e-6
G1_2 N0015 n2 N0020 n1 1.8e-6
Leff N0025 N0030 50200.
Lmech2 N0035 N0005 8070.
Lport N0040 p2 4880.
Rdc p1 N0020 89.
Rpierce N0005 n2 1.57e10
Rport N0040 N0010 6.3e7
RKarm N0025 N0015 1
.ends
*