%--------------------------------- % Species %--------------------------------- SPECIES PRESETSPECIESDATA SF6_1m = SF6 SF6 = SF6 F2_1p = F2 F2_1m = F2 F2 = F2 F_1p = F F_1m = F F = F Ar = Ar Ars = Ar Ar_1p = Ar END SPECIES USERDEFINED SF5_1p ! 0.1270 4.082[angstrom] 206.90 0.000 SF5_1m ! 0.1270 4.082[angstrom] 206.90 0.000 SF5 ! 0.1270 4.082[angstrom] 206.90 0.000 SF4_1p ! 0.1080 4.082[angstrom] 206.90 0.000 SF4_1m ! 0.1080 4.082[angstrom] 206.90 0.000 SF4 ! 0.1080 4.082[angstrom] 206.90 0.000 SF3_1p ! 0.0890 4.082[angstrom] 206.90 0.000 SF3_1m ! 0.0890 4.082[angstrom] 206.90 0.000 SF3 ! 0.0890 4.082[angstrom] 206.90 0.000 SF2_1p ! 0.0700 4.082[angstrom] 206.90 0.000 SF2_1m ! 0.0700 4.082[angstrom] 206.90 0.000 SF2 ! 0.0700 4.082[angstrom] 206.90 0.000 SF_1p ! 0.0510 4.082[angstrom] 206.90 0.000 SF ! 0.0510 4.082[angstrom] 206.90 0.000 S_1p ! 0.0320 4.082[angstrom] 206.90 0.000 S ! 0.0320 4.082[angstrom] 206.90 0.000 END %--------------------------------- % Reaction Group Import %--------------------------------- REACTIONGROUPIMPORT SF6_Ar_plasma_chemistry_import_SF6.txt ! SF6 SF6_Ar_plasma_chemistry_import_F2.txt ! F2 SF6_Ar_plasma_chemistry_import_Ar.txt ! Ar SF6_Ar_plasma_chemistry_import_ion-ion_reactions.txt ! Ion-Ion SF6_Ar_plasma_chemistry_import_neutral-neutral_reactions.txt ! Neutral-Neutral END %--------------------------------- % Surface reactions %--------------------------------- SURFACEREACTIONS F=>0.5F2 ! 0.500 0 0 SF5+=>SF5 ! 1.000 0.02 5.8 SF4+=>SF4 ! 1.000 0.02 5.8 SF3+=>SF3 ! 1.000 0.02 5.8 SF2+=>SF2 ! 1.000 0.02 5.8 SF+=>SF ! 1.000 0.02 5.8 S+=>S ! 1.000 0.02 5.8 F2+=>F2 ! 1.000 0.02 5.8 F+=>F ! 1.000 0.02 5.8 Ar+=>Ar ! 1.000 0.07 5.8 Ars=>Ar ! 1.000 0.07 5.8 END %--------------------------------- % Species - Thermodynamics %--------------------------------- SPECIES THERMODYNAMICPARAMETERS SF5_1p 200 1000 6000 -3.84810931 0.0833564911 -1.32150474E-4 9.99672449E-8 -2.93723522E-11 -148233.041 37.2013304 15.5707503 0.00356270519 -1.40710159E-6 2.41523478E-10 -1.50764818E-14 -152276.157 -56.6147112 11.2 END SPECIES THERMODYNAMICPARAMETERS SF5_1m 200 1000 6000 -3.84810931 0.0833564911 -1.32150474E-4 9.99672449E-8 -2.93723522E-11 -148233.041 37.2013304 15.5707503 0.00356270519 -1.40710159E-6 2.41523478E-10 -1.50764818E-14 -152276.157 -56.6147112 0 END SPECIES THERMODYNAMICPARAMETERS SF5 200 1000 6000 -3.84810931 0.0833564911 -1.32150474E-4 9.99672449E-8 -2.93723522E-11 -148233.041 37.2013304 15.5707503 0.00356270519 -1.40710159E-6 2.41523478E-10 -1.50764818E-14 -152276.157 -56.6147112 0 END SPECIES THERMODYNAMICPARAMETERS SF4_1p 200 1000 6000 -3.84810931 0.0833564911 -1.32150474E-4 9.99672449E-8 -2.93723522E-11 -148233.041 37.2013304 15.5707503 0.00356270519 -1.40710159E-6 2.41523478E-10 -1.50764818E-14 -152276.157 -56.6147112 12.03 END SPECIES THERMODYNAMICPARAMETERS SF4_1m 200 1000 6000 -3.84810931 0.0833564911 -1.32150474E-4 9.99672449E-8 -2.93723522E-11 -148233.041 37.2013304 15.5707503 0.00356270519 -1.40710159E-6 2.41523478E-10 -1.50764818E-14 -152276.157 -56.6147112 0 END SPECIES THERMODYNAMICPARAMETERS SF4 200 1000 6000 -3.84810931 0.0833564911 -1.32150474E-4 9.99672449E-8 -2.93723522E-11 -148233.041 37.2013304 15.5707503 0.00356270519 -1.40710159E-6 2.41523478E-10 -1.50764818E-14 -152276.157 -56.6147112 0 END SPECIES THERMODYNAMICPARAMETERS SF3_1p 200 1000 6000 -3.84810931 0.0833564911 -1.32150474E-4 9.99672449E-8 -2.93723522E-11 -148233.041 37.2013304 15.5707503 0.00356270519 -1.40710159E-6 2.41523478E-10 -1.50764818E-14 -152276.157 -56.6147112 11 END SPECIES THERMODYNAMICPARAMETERS SF3_1m 200 1000 6000 -3.84810931 0.0833564911 -1.32150474E-4 9.99672449E-8 -2.93723522E-11 -148233.041 37.2013304 15.5707503 0.00356270519 -1.40710159E-6 2.41523478E-10 -1.50764818E-14 -152276.157 -56.6147112 0 END SPECIES THERMODYNAMICPARAMETERS SF3 200 1000 6000 -3.84810931 0.0833564911 -1.32150474E-4 9.99672449E-8 -2.93723522E-11 -148233.041 37.2013304 15.5707503 0.00356270519 -1.40710159E-6 2.41523478E-10 -1.50764818E-14 -152276.157 -56.6147112 0 END SPECIES THERMODYNAMICPARAMETERS SF2_1p 200 1000 6000 -3.84810931 0.0833564911 -1.32150474E-4 9.99672449E-8 -2.93723522E-11 -148233.041 37.2013304 15.5707503 0.00356270519 -1.40710159E-6 2.41523478E-10 -1.50764818E-14 -152276.157 -56.6147112 10.08 END SPECIES THERMODYNAMICPARAMETERS SF2_1m 200 1000 6000 -3.84810931 0.0833564911 -1.32150474E-4 9.99672449E-8 -2.93723522E-11 -148233.041 37.2013304 15.5707503 0.00356270519 -1.40710159E-6 2.41523478E-10 -1.50764818E-14 -152276.157 -56.6147112 0 END SPECIES THERMODYNAMICPARAMETERS SF2 200 1000 6000 -3.84810931 0.0833564911 -1.32150474E-4 9.99672449E-8 -2.93723522E-11 -148233.041 37.2013304 15.5707503 0.00356270519 -1.40710159E-6 2.41523478E-10 -1.50764818E-14 -152276.157 -56.6147112 0 END SPECIES THERMODYNAMICPARAMETERS SF_1p 200 1000 6000 -3.84810931 0.0833564911 -1.32150474E-4 9.99672449E-8 -2.93723522E-11 -148233.041 37.2013304 15.5707503 0.00356270519 -1.40710159E-6 2.41523478E-10 -1.50764818E-14 -152276.157 -56.6147112 10.09 END SPECIES THERMODYNAMICPARAMETERS SF 200 1000 6000 -3.84810931 0.0833564911 -1.32150474E-4 9.99672449E-8 -2.93723522E-11 -148233.041 37.2013304 15.5707503 0.00356270519 -1.40710159E-6 2.41523478E-10 -1.50764818E-14 -152276.157 -56.6147112 0 END SPECIES THERMODYNAMICPARAMETERS S_1p 200 1000 6000 -3.84810931 0.0833564911 -1.32150474E-4 9.99672449E-8 -2.93723522E-11 -148233.041 37.2013304 15.5707503 0.00356270519 -1.40710159E-6 2.41523478E-10 -1.50764818E-14 -152276.157 -56.6147112 10.09 END SPECIES THERMODYNAMICPARAMETERS S 200 1000 6000 -3.84810931 0.0833564911 -1.32150474E-4 9.99672449E-8 -2.93723522E-11 -148233.041 37.2013304 15.5707503 0.00356270519 -1.40710159E-6 2.41523478E-10 -1.50764818E-14 -152276.157 -56.6147112 0 END