GEC CCP Reactor, Argon Chemistry
Application ID: 55011
This model investigates the National Institute of Standards and Technology (NIST) Gaseous Electronics Conference (GEC) reference cell in two dimensions using the Plasma, Time Periodic interface. A 2D example helps in understanding the physics without excessive CPU time.
The cell is driven with a fixed power and the results show good agreement with those published in the literature.
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however, additional products may be required to completely define and model it. Furthermore, this example may also be defined and modeled using components from the following product combinations:
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