MEMS Scanning Mirror
Application ID: 124281
MEMS scanning mirrors are a type of MEMS device that realizes optical path control by controlling mirror torsion through a microdriver. The torsion can be single axis or double axis. MEMS scanning mirrors are widely used in laser projection, laser radar, laser processing, and other fields.
In this case, the electrostatic driving torque is calculated by means of an analytical formula, as an alternative to moving mesh. The single-axis scanning micromirror, which is driven by an electrostatic comb, is modeled using a solid mechanics interface coupled to a geometric optics interface and with static and dynamic studies to describe a dynamic scanning process.
This model example illustrates applications of this type that would nominally be built using the following products:
however, additional products may be required to completely define and model it. Furthermore, this example may also be defined and modeled using components from the following product combinations:
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Specification Chart and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.