The Application Gallery features COMSOL Multiphysics® tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and chemical disciplines. You can use these examples as a starting point for your own simulation work by downloading the tutorial model or demo app file and its accompanying instructions.
Search for tutorials and apps relevant to your area of expertise via the Quick Search feature. Note that many of the examples featured here can also be accessed via the Application Libraries that are built into the COMSOL Multiphysics® software and available from the File menu.
This tutorial model solves for an inductively coupled plasma reactor in a mixture of argon/oxygen. The model computes the fluid flow and gas heating. Important aspects and strategies for modeling electronegative discharges are discussed. Read More
This model computes the ion energy distribution function (IEDF) for a commercial capacitively coupled plasma reactor. The results show good agreement with experimental data. Read More
This tutorial model shows how to set up a model of a pulsed capacitive discharge. The on pulse consists of 10 periods of excitation at 13.56MHz, followed by no excitation for 100 periods. The I-V characteristics, the electron density, temperature and plasma potential are studied. Read More
The underlying physics of a capacitively coupled plasma is rather complicated, even for rather simple geometric configurations and plasma chemistries. This model benchmarks the Capacitively Coupled Plasma physics interface against many different codes. Read More
This tutorial drives a capacitively coupled plasma with an L-type matching network at high and low powers. At low power, where the harmonics in the current are low, prefect matching is obtained at the chosen power value. Sweeps over power, frequency, and pressure are performed and their ... Read More
The electron energy distribution function (EEDF) plays an important role in the overall behavior of discharges. Analytic forms of the EEDF exist such as Maxwellian or Druyvesteyn, but in some cases they fail to fit the discharge physics. This tutorial model investigates the effects of ... Read More
This model shows how shape optimization can be used design the coils of an ICP reactor to obtain plasma uniformity. The reactor in study is a planar ICP with the coils distributed along the radial direction. The Optimization study step is used to find the best coil placement so that the ... Read More
The electron energy distribution function (EEDF) plays an important role in the overall behavior of discharges. In this example, the formation period of an Argon plasma is studied with special attention paid to the EEDF. The plasma is created within a 4 cm gap by a DC source voltage of 1 ... Read More
This tutorial model solves for a one-dimensional capacitively coupled plasma reactor in a mixture of argon/oxygen. Important aspects and strategies for modeling electronegative discharges are discussed. Read More
This tutorial model demonstrates how to compute the impedance of a capacitively coupled plasma. The Time Periodic study computes the time periodic solution of the plasma. Subsequently, the solution is transformed to the time domain, after which the fast Fourier transform (FFT) solver is ... Read More