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Design and Characterization of a MEMS Varactor
Published in 2011
The tunable capacitor (variable capacitor) is one of the most important and components in filters, Phase shifters, VCO etc. A tunable capacitor can also be built using electro – thermal actuating mechanism. Compared to electro static, tunable capacitors actuated by thermal actuators have several advantages like lower driving voltages. The performance of thermal actuator becomes a key factor for performance of a tunable capacitor can provide larger forces and is also easier to control.
Four thermal actuators are employed to design a varactor (variable capacitor). Structural modeling has been done using COMSOL and the results are presented.
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- nagaraja_presentation.pdf - 0.35MB
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