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White Papers and Application Notes
Design and Simulation of a MEMS Directional Acoustic Sensor
Published in 2016
A Piezoelectric Directional Microphone is demonstrated based on a bio-mimetic design inspired by the parasitoid fly Ormia ochracea using the PiezoMUMPs multi-user foundry. The device simulation was conducted using COMSOL Multiphysics® software which achieves a directional sound field response and frequency band of 3.5 KHz to 4.5KHz. The sensitivity of the device is 3.8nV/pa.
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