Technical Papers and Presentations

Micromirror is a versatile MEMS device, which finds use in many application areas. In this paper, we have addressed the issues related to the design and behavioral simulation of MEMS based electro-thermal micromirror [Figure 1] for 3D motion.

Two types of thermal actuation mechanism are used in the designed device. For in-plane movement poly-silicon made two-hot-arm actuatoris used. Here, the electric current only passes through the outer and inner hot arms, this causes that the temperature of the thinner ‘hot’ arm to become much higher than the ‘wider’ cold arm.