Investigation on Atmospheric Plasma Processing in Dielectric Barrier Discharge Configuration
In this study, plasma processing parameters of a dielectric barrier discharge (DBD) based argon plasma was carried at atmospheric pressure in flat plate configuration. The time dependent one-dimensional plasma module was adapted for modeling of the DBD in copper electrodes with quartz glass as a dielectric material. The discharge is carried out by a sinusoidal alternating high voltage-power supply at 5 kV. Besides, surface charge accumulation, recombination of charge species, production of ions and ion losses have been studied. Time dependent one-dimensional plasma parameters including, electron density, electron temperature, electric potential and surface ion current density were simulated. The insights obtained in this work can be used for plasma-based pollutant removal process.
