Single Crystal Diamond NEMS Switch

M. Liao
Optical and Electronic Materials Unit
National Institute for Materials Science
Japan
Published in 2011

A single-crystal diamond NEMS switch was fabricated while batch production of SCD MEMS/NEMS structures were developed.

The diamond NEMS switches exhibit high performance with respect to high controllability, high reproducibility, and good reliability.

Modeling and simulations were made that were consistent with experiments.

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