Technical Papers and Presentations

Quick Search

Resources

White Papers and Application Notes

See How Multiphysics Simulation Is Used in Research and Development

Engineers, researchers, and scientists across industries use multiphysics simulation to research and develop innovative product designs and processes. Find inspiration in technical papers and presentations they have presented at the COMSOL Conference. Browse the selection below or use the Quick Search tool to find a specific presentation or filter by application area.

View the COMSOL Conference 2024 Collection

All

Boston 2024

Florence 2024

Search Term:

MEMS and Nanotechnology

Primary Current Distribution Model for Electrochemical Etching of Silicon through a Circular Opening

A. Ivanov [1], U. Mescheder [1],
[1] Hochschule Furtwangen University, Furtwangen im Schwarzwald, Germany

Primary current distribution model for anodization of low-doped p-type silicon through a circular opening in frontside insulating mask is developed. The model is applied in two regimes of the process – pore formation and electropolishing – by definition of current density dependent ... Read More

Nanowire Based Flexible Piezoelectric Sensor for Structural Health Monitoring Applications

A. El Kacimi [1], E. Pauliac-Vaujour [1], J. Eymery [2]
[1] University Grenoble Alpes, CEA, LETI, MINATEC Campus, Grenoble, France
[2] University Grenoble Alpes, CEA, Grenoble, France

We report on the modeling of flexible piezoelectric capacitive sensor based on GaN wires grown by Metal Organic Vapor Phase Epitaxy. Single crystal cone-shaped wires with hexagonal cross section are embedded within dielectric layers (parylene) in between two metal electrodes to achieve a ... Read More

Simulation of a Buckled Cantilever Plate with Thermal Bimorph Actuators

A. Arevalo [1], D. Conchouso [1], D. Castro [1], M. Diaz [2], I. G. Foulds [3],
[1] CEMSE Division, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
[2] Physical Sciences and Engineering Division, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
[3] University of British Columbia, Vancouver, BC, Canada

INTRODUCTION: Micro Electro Mechanical Systems (MEMS) are fabricated with an in-plane fabrication technology. Out-of-plane structures can be designed to be assembled to provide thermal and electrical isolation from the substrate [1 -3]. These isolations can potentially improve the ... Read More

PVDF Piezoelectric Nanofibers as Hair Cell Substitutes: A Feasibility Study

C. R. Pérez [1], J. J. Santiago-Avilés [2],
[1] Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, PA, USA
[2] Department of Electrical and Systems Engineering, University of Pennsylvania, Philadelphia, PA, USA

Sensorineural hearing loss is the most common sensory deficit in the world, and within this category damage or loss of the primary sensory cells of the inner ear, known as hair cells is the most common cause [1]. Partial hearing loss is addressed by the use of hearing aids, electronic ... Read More

Simulation of a Dual Axis MEMS Seismometer For Building Monitoring System

M. A. Shah [1], F. Iqbal [1], B. L. Lee [1],
[1] Korea University of Technology and Education, Cheonan, Chungcheong, South Korea

A dual axis MEMS seismometer targeted for building monitoring system has been simulated for a full scale of ±5g acceleration. The design uses the capacitive effect for vibration sensing. This comb drive capacitive MEMS seismometer consists of 8 springs with two proof masses. The device ... Read More

Design and Simulation of A MEMS Based Horseshoe Shaped Low Current Lorentz Deformable Mirror (LCL-DM)

B. Park [1], T. Chen [1], C. Shafai [1],
[1] Department of Electrical and Computer Engineering, University of Manitoba, Winnipeg, MB, Canada

This poster presents the design and analysis of a novel horseshoe shaped MEMS actuator for adaptive optics. The actuation mechanism is Lorentz force enabling low current (below 10 mA) operation. The actuator combined with an overlying aluminum coated SU-8 soft polymer membrane for the ... Read More

A Comparison of Mass Reduction Methods for Silicon-on-Oxide (SOI)-based Micromirrors

H. J. Hall [1], L. A. Starman [1],
[1] Sensors Directorate, Air Force Research Laboratory, Wright-Patterson AFB, OH, USA

Beam steering and adaptive optics micromirror applications commonly demand optically flat surfaces with minimal mass. When reflective coatings (usually metallic Au or Al) are applied to micromirror surfaces in order to meet optical reflectivity requirements the resulting film stress ... Read More

Design, Simulation, and Fabrication of Thermal Angular Accelerometers

H. Alrowais [1],
[1] School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA

This abstract introduces a sensor design for detecting angular acceleration in a single plane using thermal convection. The working principal of the device is based on probing temperature profile changes along a micro-torus caused by angular acceleration. By properly choosing the ... Read More

Numerical Analysis on Plasmonic Nano-Cucumber Achieving Large EFs and Wide Tuneability of the Peak

A. Zare [1], E. Cutler [1], H. Cho [1],
[1] Center for Biomedical Engineering & Science, University of North Carolina - Charlotte, Charlotte, NC, USA

INTRODUCTION: Researchers in the biomedical field have recently become interested in the potential applications of plasomics. Surface plasmon resonance based on optical properties of metallic nanostructures can be used for detection of special biological targets. Gold nanostructures with ... Read More

Statistical Modeling and Contact Analysis of RF MEMS Surface

J. Liu [1], V. B. Chalivendra [1], C. Goldsmith [2], W. Huang [1],
[1] Department of Mechanical Engineering, University of Massachusetts - Dartmouth, Dartmouth, MA, USA
[2] MEMtronics Corporation, Richardson, TX, USA

Radio frequency (RF) micro-electro mechanical system(MEMS) switch works in on/off modes controlled by electrostatic forces. In off mode, rough surfaces of electrodes come into a contact to shunt the RF signal. Surface contact area has been recognized as a key factor in RF MEMS ... Read More

First

171–180 of 531

Last