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Multiphysics Simulation: An IEEE Spectrum Insert
Manager’s Guide
ASML Advances Computing Breakthroughs with Multiphysics Modeling
Fred Huizinga, ASML, NetherlandsAt ASML, the development of cutting-edge computer chips and the machinery to produce them requires a complex understanding of the many coupled physical processes involved. To design machines at this level of precision requires simulation at every step, making the availability of a comprehensive simulation toolbox invaluable. For example, engineers at ASML worked on the design of an air bearing responsible for high-precision movements in photolithography machines. They also created simulation apps to allow colleagues throughout the team to virtually test the performance of different designs.
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- ASML_CN2018.pdf - 1.21MB