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Thermoelastic damping in MEMS resonators

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Dear all,

I'm using Comsol to simulate a mems resonator. I want to model thermoelastic damping in the resonator. When I use anisotronic material for my model, I got errors. But when I tried to simulate with isotropic materials, it worked. So It seem that thermoelasticity interface in Comsol cannot work with anisotropic materials.

So Could anyone please help me how to simulate it with anisotropic materials.

Thanks in advance!!!

3 Replies Last Post Nov 25, 2014, 3:56 p.m. EST
Henrik Sönnerlind COMSOL Employee

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Posted: 1 decade ago Mar 25, 2014, 8:39 a.m. EDT
Hi,

Using anisotropic materials in the Thermoelasticity interface should not cause any problems .

Could you please be a bit more specific about the type or error message that you receive, or possibly post a model?

Regards,
Henrik
Hi, Using anisotropic materials in the Thermoelasticity interface should not cause any problems . Could you please be a bit more specific about the type or error message that you receive, or possibly post a model? Regards, Henrik

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Posted: 1 decade ago Mar 25, 2014, 11:13 a.m. EDT
Hi Henrik,

When I follow this paper "Thermoelastic Damping in a MEMS Resonator " to simulate my model with isotropic diamond material It showed good results. But when I changed to anisotropic diamond material I get error "Failed to evaluate variable Jacobian.
-Variable: Mod1.te.Dr66.
-Geometry:1
- Domain: 1 5 9
-Feature:Eigenvalue Solver1(sol1/e1)
-Error: Failed to evaluate variable Jacobian "
So here I attatched my file for the error and model.

I hope you can help me fix this problem. Thanks a lot.

Regards,
Ha Dep

Hi Henrik, When I follow this paper "Thermoelastic Damping in a MEMS Resonator " to simulate my model with isotropic diamond material It showed good results. But when I changed to anisotropic diamond material I get error "Failed to evaluate variable Jacobian. -Variable: Mod1.te.Dr66. -Geometry:1 - Domain: 1 5 9 -Feature:Eigenvalue Solver1(sol1/e1) -Error: Failed to evaluate variable Jacobian " So here I attatched my file for the error and model. I hope you can help me fix this problem. Thanks a lot. Regards, Ha Dep


Mohammadreza Mohagheghi Nejad

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Posted: 10 years ago Nov 25, 2014, 3:56 p.m. EST
Hi,
I have been trying to model thermoelastic damping in an electrostatic micro plate in comsol 4.3, could anyone help me how to simulate it in comsol 4.3. Any help will be appreciated.
Hi, I have been trying to model thermoelastic damping in an electrostatic micro plate in comsol 4.3, could anyone help me how to simulate it in comsol 4.3. Any help will be appreciated.

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