Manufacturing Variation Effects in a Micromachined Comb-Drive Tuning Fork Rate Gyroscope
Application ID: 89261
This tutorial example is kindly provided by Dr. James Ransley at Veryst Engineering, LLC. This model continues from the base model “A Micromachined Comb-Drive Tuning Fork Rate Gyroscope”, which is also provided by Dr. Ransley. The model demonstrates how to accurately compute the effects of manufacturing variations of MEMS devices without the need of very fine mesh. This highly efficient modeling approach is based on the unique Deformed Geometry functionality of COMSOL Multiphysics, which implements the device shape change due to fabrication imperfections using the same mesh, thus eliminating the error introduced if different meshes were to be used for different geometries.
This model example illustrates applications of this type that would nominally be built using the following products:
however, additional products may be required to completely define and model it. Furthermore, this example may also be defined and modeled using components from the following product combinations:
- COMSOL Multiphysics® and
- either the Acoustics Module, MEMS Module, or Structural Mechanics Module
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Specification Chart and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.