Solidly Mounted Resonator 3D
Application ID: 102391
A solidly-mounted resonator (SMR) is a piezoelectric MEMS resonator formed on top of an acoustic mirror stack deposited on a thick substrate. This tutorial shows how to simulate an SMR in 3D. In this example, the eigenmodes were computed with varying number of particles attached to the sensor surface for computing the sensitivity, and the corresponding change in frequency response was analyzed. The resonant frequency decreases with more attached particles, and the sensitivity depends on the attachment location relative to the mode shape - both observations are as expected.
This model example illustrates applications of this type that would nominally be built using the following products:
however, additional products may be required to completely define and model it. Furthermore, this example may also be defined and modeled using components from the following product combinations:
- COMSOL Multiphysics® and
- either the Acoustics Module, MEMS Module, or Structural Mechanics Module and
- either the AC/DC Module, MEMS Module, Plasma Module, or Semiconductor Module
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Specification Chart and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.