COMSOL Multiphysics^® 6.1 Release Highlights

Plasma Module Updates

For users of the Plasma Module, COMSOL Multiphysics^® version 6.1 provides the ability to model coupled plasma reactors with a periodic RF bias, a new Plasma Chemistry add-in that creates a complete plasma chemistry from a text file for models, and four new tutorial models. Read more about these updates below.

Inductively Coupled Plasma with RF Bias Multiphysics Interface

The new Inductively Coupled Plasma with RF Bias multiphysics interface couples the Plasma, Time Periodic and Magnetic Fields interfaces to model inductively coupled plasma (ICP) reactors with a capacitive radiofrequency periodic excitation. The magnetic field is solved in the frequency domain, and the plasma transport equations are solved for a periodic steady state. This interface is dedicated to the modeling of plasma reactors with inductive and capacitive power coupling mechanisms and can be viewed in the new Model of an Argon and Chlorine Inductively Coupled Plasma Reactor with RF Bias model.

Simulation results of an inductively coupled plasma reactor with RF bias operating in a mixture of argon and chlorine.

Plasma Chemistry Add-In

The Plasma Chemistry add-in automatically creates a complete plasma chemistry from a text file for models using the Plasma and Plasma, Time Periodic interfaces. With the add-in, you can specify the aspects of a plasma chemistry in the file, such as species properties like thermodynamic parameters, electron impact reactions from cross sections and rate constants, heavy species reactions, and surface reactions. The following new models use this feature:

• Model of an Argon and Chlorine Inductively Coupled Plasma Reactor with RF Bias
• Model of an Argon and Oxygen Inductively Coupled Plasma Reactor
• Model of an Argon and Oxygen Capacitively Coupled Plasma Reactor

The Plasma Chemistry add-in (left) is used to import an argon–chlorine plasma chemistry file (right). The plasma features are automatically created by the add-in.

New Tutorial Models

COMSOL Multiphysics^® version 6.1 brings four new tutorial models to the Plasma Module.

Model of an Argon and Chlorine Inductively Coupled Plasma Reactor with RF Bias

Model results of an inductively coupled plasma reactor with RF bias operating in a mixture of argon and chlorine. This tutorial uses the Inductively Coupled Plasma with RF Bias interface to model an argon and chlorine inductively coupled plasma reactor with a capacitive RF periodic excitation. The magnetic field is solved in the frequency domain and the plasma solves for a periodic solution. The fluid flow and gas heating are solved self-consistently with the plasma model.

Application Library Title:
icp_ccp_argon_chlorine
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Model of an Argon and Oxygen Inductively Coupled Plasma Reactor

This tutorial models an argon–oxygen inductively coupled plasma reactor. The fluid flow and gas heating are solved self-consistently with the plasma model. The new Plasma Chemistry add-in is used to import a complete plasma chemistry from a file. Important aspects and strategies for modeling electronegative discharges are discussed in the related model files.

Application Library Title:
icp_argon_oxygen
Download from the Application Gallery

Model of an Argon and Oxygen Capacitively Coupled Plasma Reactor

Time-averaged density of the charged species in a capacitively coupled plasma (CCP) reactor for argon and oxygen mole fractions of 0.1 and 0.9, respectively. This model presents a study of an argon–oxygen plasma sustained between two metal electrodes by a 13.56 MHz electric excitation. The mole fraction of oxygen is parameterized, and it is possible to observe a transition in dominant positive ions. The core of the discharge is electronegative, with negative ions (dark blue) being the dominant negative charge carrier. The negative ion density drops fast toward the edges, where electrons (light blue) are the dominant negative charge carrier.

Application Library Title:
ccp_argon_oxygen
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Dry Air Boltzmann Analysis

Electron energy distribution function (logarithm base 10) as a function of the electron energy parameterized for several electron mean energies. In this model, the Boltzmann equation in the two-term approximation is solved for a mixture of nitrogen and oxygen at 80:20 (to represent dry air) to obtain the electron energy distribution function (EEDF) and the macroscopic transport parameters and sources terms that can be used in a fluid-type model. This tutorial also explains how to prepare the EEDF for export so that it can be used in the Plasma interface.

Application Library Title:
boltzmann_dry_air
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